Aalborg GFC Uživatelský manuál

Technical Data Sheet No. TD9709M Rev. NDate of Issue: March 2013OPERATING MANUALGFC MASS FLOW CONTROLLER

64. SPECIFICATIONSFLOW MEDIUM: Please note that GFC Mass Flow Controllers are designed to work withclean gases only. Never try to meter or control f

LEAK INTEGRITY: 1 x 10-7sccs He max to the outside environment.ATTITUDE SENSITIVITY: No greater than ±15 degree rotation from horizontal. Standardcali

8TABLE I GFC 17 LOW FLOW MASS FLOW CONTROLLER*4.2 Flow CapacitiesMODEL CODEmL/min [N2]CODEliters/min [N2]1701 10 07 102 20 08 203 50 09 504 100 10 100

GFC 17/37/47 CAUTIONCAUTION: If the valve is left in the AUTO (control) or OPEN (PURGE)mode for an extended period of time, it may become warm or even

5.2 Flow Signal Output ReadingsThe flow signal output can be viewed on the LCD display, remote panel meter, dig-ital multimeter, or other display de

Setpoints are controlled locally or remotely. Setpoints inputs respond to analog 0to 5 VDC or 4 to 20 mA reference voltages (default jumper setting is

12,Conversely, when the connection is left open or pin [12] remains unconnected thevalve remains active. The valve will remain active when the VALVE

6.2 Flow Path CleaningInspect visually the flow paths at the inlet and outlet ends of the meter for anydebris that may be clogging the flow through t

14FIGURE 6-1 SOLENOID VALVEVarious corrosive gases may demand more frequent replacement of VITON7O-rings and seals inside the valve. Be sure to use an

7. CALIBRATION PROCEDURESNOTE: Removal of the factory installed calibration seals and/or any adjustments made to the meter, as described in this sec

16FIGURE 7-1 CALIBRATION POTENTIOMETER AND JUMPER LOCATIONS (BACK OF GFC)7.2 Calibration of GFC Mass Flow ControllersAll adjustments in this section

177.2.2 ZERO AdjustmentShut off the flow of gas into the Mass Flow Controller. To ensure that no seepage orleak occurs into the meter, temporarily

7.2.5 Connections and Initial Warm UpConnect the multimeter to output pins [1] and [2] for 0 to 5 VDC (or pins [9] and[14] for 4 to 20 mA) of the 15

7.2.9 75% Flow AdjustmentUsing the flow regulator, increase the flow rate to 75% of full scale flow. Check theflow rate indicated against the flow c

7.2.14 50% Flow AdjustmentChange the setpoint to 2.50 VDC to control at 50% of full scale flow. Check theflow rate indicated against the flow calibr

7.2.17.2 Adjust ScalingUsing a digital multimeter connected to either the 0 to 5 VDC or 4 to 20 mA sig-nal at the 15-pin “D” connector, set the flow r

228.2 Troubleshooting Guide INDICATION LIKELY REASON REMEDYlack of reading power supply off check connection of power supply or outputfuse blo

INDICATION LIKELY REASON REMEDYcalibration off gas metered is not the same as use matched calibrationwhat meter was calibrated forcomposition of gas

24QO2 = Qa = Qr X K = 1000 X 0.9926 = 992.6 sccmwhere K = relative K factor to reference gas (oxygen to nitrogen)1d X Cpwhere d = gas dens

25aalborg7APPENDIX 1COMPONENTS DIAGRAMGFC METERING PC BOARD (TOP SIDE)

TABLE OF CONTENTS1. UNPACKING THE GFC MASS FLOW CONTROLLER...1.1 Inspect Package for External Damage...

26COMPONENTS DIAGRAMMETERING PC BOARD (BOTTOM SIDE)

27APPENDIX 2GAS FACTOR TABLE (“K” FACTORS)CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that r

28ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Deuterium D21.00 1.722 1.799Diborane B2H6.4357 .508 1.235Dibromodifluoromethane CBr2F2.1947 .15

29ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Hydrogen Bromide HBr1.000 .0861 3.610Hydrogen Chloride HCl1.000 .1912 1.627Hydrogen Cyanide HCN

30ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Phosphorous Oxychloride POCl3.36 .1324 6.843Phosphorous Pentafluoride PH5.3021 .1610 5.620Phosp

31APPENDIX 3DIMENSIONAL DRAWINGS2.380.95DIMENSIONS: INCH [mm]GFC17 MASS FLOW CONTROLLERNOTE: Aalborg7 reserves the right to change designs and dimensi

322.69 [68.3]0.69 [17.5]3.94 [99.9]4.88 [123.8]5.98 [151.8]FOR HIGH FLOW MASS FLOW CONTROLLER ONLY6-32DIMENSIONS: INCH [mm]2.380.951.25 [31.8]0.28 [7.

330.95 SAE/MS SWAGELOK 3/8 TUBE CONNECTOR 2.38 7" (177,8) 9.98 (253,5) 12.30 (312,4) 10-24 UNC 0.250.18 (4,6)1.39 (35,3)1.39 (35,3)1" (25

347.55 (191.8 mm) 3.00 (76.2 mm) 3.00(76.2 mm)12.62 (320.5 mm)10.42 (264.7 mm)7.25 (184.1 mm)2.50 (63.5 mm)6.75 (171.5 mm)4 x 1/4-20 UNC-2B 0.352 x

35NOTE: Aalborg7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions pleas

7.2.5 Connections and Initial Warm Up...7.2.6 ZERO Adjustment...

APPENDIX 4NOTE: Follow Return Procedures In Section 1.3.WARRANTYAalborg7 Mass Flow Systems are warranted against parts and workmanship for a period o

11. UNPACKING THE GFC MASS FLOW CONTROLLER1.1 Inspect Package for External DamageYour GFC Mass Flow Controller was carefully packed in a sturdy card

2. INSTALLATION2.1 Primary Gas ConnectionsPlease note that the GFC Mass Flow Controller will not operate with liquids. Onlyclean gases are allowed

3PIN FUNCTION1 0 to 5 VDC Flow Signal Common2 0 to 5 VDC Flow Signal Output3 Common4 Open (Purge)5 Common, Power Supply6 (unassigned)7 +12 VDC (+24 VD

FIGURE 2-2, POTENTIOMETER AND JUMPER LOCATIONS2.2.1 Valve Control ConfigurationThere are three basic valve control options. (a) LOCAL or REMOTE contr

2.2.3 Panel Mounting ReadoutsAnother option for the GFC Mass Flow Controller is the Panel Mounting RemoteReadout. In this configuration the LCD reado