Aalborg DFC Digital Uživatelský manuál Strana 1

OPERATING MANUALDFC MASS FLOW CONTROLLERTechnical Data Sheet No. TD9805M Rev. ODate of Issue: February 2012

4.1 DFC 26/36/46 Mass Flow ControllersACCURACY: +1% of full scale, including linearity for gas temperatures ranging from59 FF to 77 FF (15 FC to 25 F

Aalborg7 makes no expressed or implied guarantees of corrosion resistance ofmass flow meters as pertains to different flow media reacting with compone

FLOW RANGESTABLE I DFC 26 LOW FLOW MASS FLOW CONTROLLERS*TABLE II DFC 36 MEDIUM FLOW MASS FLOW CONTROLLERS*TABLE III DFC 46 HIGH FLOW MASS FLOW CONTRO

TABLE IV PRESSURE DROPSTABLE V APPROXIMATE WEIGHTS10MODELFLOW RATE[std liters/min]MAXIMUM PRESSURE DROP[mm H2O] [psid][mbar]DFC 26up to 10720 1.06 75D

5. OPERATING INSTRUCTIONS5.1 Preparation and Warm UpIt is assumed that the Mass Flow Controller or Controller has been correctlyinstalled and th

5.4 Set Point Reference SignalDFC flow controllers have a built-in solenoid valve and allow the user to set theflow to any desired flow rate within

5.7 Analog Interface ConfigurationThe DFC can be configured for the desired range and scaling by selection ofanalog board (see APPENDIX 1 on page 21

6.2 Flow Path CleaningBefore attempting any disassembly of the unit for cleaning, try inspecting the flowpaths by looking into the inlet and outlet

Inspect the flow path inside the transducer for any visible signs of contaminants.If necessary, flush the flow path through with alcohol. Thoroughly d

priate relative correction factor should be recalculated see section (9).It is standard practice to calibrate Mass Flow Meters/Controllers with dry ni

TABLE OF CONTENTS1. UNPACKING THE DFC MASS FLOW CONTROLLER...1.1 Inspect Package for External Damage...

8. TROUBLESHOOTING8.1 Common ConditionsYour Mass Flow Controller was thoroughly checked at numerous quality controlpoints during and after manufac

8.3 Troubleshooting Guide18Remedycheck connection of power supplydisconnect DFC transducer from powersupply; remove the shorting conditionor check pol

19Indicationfull scale output at "no flow" condition orwith valveclosedcalibration offDFC valvedoes not workin open positionDFC valvedoes no

20QO = Qa = Qr x K = 1000 X 0.9926 = 992.6 sccmwhere K = relative K factor to reference gas (oxygen to nitrogen)1d X Cpwhere d = gas dens

APPENDIX 1COMPONENTS DIAGRAMS21DFC Digital PC Board (Primary Side)

APPENDIX 1(CONTINUED)22DFC Digital PC Board(Secondary Side)

APPENDIX 1(CONTINUED)23DFC Analog PC Board(Primary Side)

APPENDIX 1(CONTINUED)24DFC Analog PC Board(Secondary Side)

25APPENDIX 2GAS FACTOR TABLES (“K” FACTORS)CAUTION: K-Factors at best are only an approximation. K factors should not be used in applications that

26ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Deuterium D21.00 1.722 1.799Diborane B2H6.4357 .508 1.235Dibromodifluoromethane CBr2F2.1947 .15

APPENDIX 1 COMPONENT DIAGRAM...APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)...

27ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Hydrogen Bromide HBr1.000 .0861 3.610Hydrogen Chloride HCl1.000 .1912 1.627Hydrogen Cyanide HCN

28ACTUAL GASK FACTORRelative to N2Cp[Cal/g]Density[g/I]Phosphorous Oxychloride POCl3.36 .1324 6.843Phosphorous Pentafluoride PH5.3021 .1610 5.620Phosp

29APPENDIX 3DIMENSIONAL DRAWINGSDFC 26 Mass Flow ControllerNOTES: Aalborg7 reserves the right to change designs and dimensions at itssole discretion

30DFC 36/46 Mass Flow ControllerNOTES: Aalborg7 reserves the right to change designs and dimensions at itssole discretion at any time without notice.

APPENDIX 4SENDING COMMANDS TO THE DFCRS485The standard DFC comes with an RS485 interface. The protocol described below allows for the unit using eith

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1. UNPACKING THE DFC MASS FLOW CONTROLLER1.1 Inspect Package for External DamageYour DFC Mass Flow Controller was carefully packed in a sturdy

37APPENDIX 5CALIBRATION TABLE: GAS INDEPENDENT VARIABLESINDEXNAMEDATATYPENOTES0 BlankSDPROC char[10] Do not modify. For internal use only.1 SerialNum

38INDEX NAMEDATATYPENOTES29 Kgain[2] float30 Kgain[3] float31 Kgain[4] float32 Kgain[5] float33 Reserved float34 Reserved float35 Reserved float36 Res

CALIBRATION TABLE: GAS DEPENDENT VARIABLES39INDEX NAMEDATATYPENOTES100 GasIdentifer char[27]101 FullScaleRange float102 StdTemp float103 StdPressure f

40INDEX NAMEDATATYPENOTES129 SensorTbl[8][Sensor Value] uint130 SensorTbl[8][Flow] float131 SensorTbl[9][Sensor Value] uint132 SensorTbl[9][Flow] floa

APPENDIX 6NOTE: Follow Return Procedures In Section 1.3.41WARRANTYAalborg7 Mass Flow Systems are warranted against parts and workmanshipfor a period

Attitude sensitivity of the Mass Flow Controller is +15F. This means that the gas flowpath of the Flow Controller must be horizontal within those stat

RS-485 option:The RS485 converter/adapter has to be configured for: multidrop, 2 wire, half duplexmode. The transmitter circuit has to be enabled by T

4FIGURE b-1, WIRING DIAGRAM FOR DFC TRANSDUCERS.

PIN FUNCTION1 +15 VDC Power Supply2 0-5 VDC Flow Signal (4-20mA Option)3 0-5 VDC Set Point Input (4-20mA Option) 4 Force Valve Open Control5 Forc

3. PRINCIPLE OF OPERATIONThe stream of gas entering the Mass Flow transducer is split by shunting a smallportion of the flow through a capillary st